Integrated structure for a resonant micro-gyroscope and accelerometer. Fracture and Structural Integrity, [S. l.], v. 8, n. 29, p. pages 334–342, 2014. DOI: 10.3221/IGF-ESIS.29.29. Disponível em: https://staging.fracturae.com/index.php/fis/article/view/1265. Acesso em: 16 oct. 2026.