Fracture and Structural Integrity e-ISSN 1971-8993 Open access
Miscellanea Vol. 8, No. 29 (2014)

Integrated structure for a resonant micro-gyroscope and accelerometer

Author and affiliation details
DOI
10.3221/IGF-ESIS.29.29
Pages
pages 334-342
Published
Published inVol. 8, No. 29 (2014)Go to the issue

Abstract

This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external acceleration (one in-plane component and one out-of plane component) and two components of angular velocity (roll and yaw) on the variation of frequency of several elements set in resonance. The device, despite its small dimensions, provides a differential decoupled detection of four external quantities thanks to the presence of four slender beams resonating in bending and four torsional resonators.

Keywords

Article history

  1. ReceivedUntil the next stage: 0 days
  2. AcceptedUntil the next stage: 0 days
  3. Published

How to cite

APA

Zega, V., Comi, C., Corigliano, A., & Valzasina, C. (2014). Integrated structure for a resonant micro-gyroscope and accelerometer. Fracture and Structural Integrity, 8(29), pages 334–342. https://doi.org/10.3221/IGF-ESIS.29.29

IEEE

V. Zega, C. Comi, A. Corigliano, and C. Valzasina, “Integrated structure for a resonant micro-gyroscope and accelerometer,” Fracture and Structural Integrity, vol. 8, no. 29, pp. pages 334–342, 2014, doi: 10.3221/IGF-ESIS.29.29.

MLA

Zega, V., et al. “Integrated structure for a resonant micro-gyroscope and accelerometer.” Fracture and Structural Integrity, vol. 8, no. 29, 2014, pp. pages 334–342. https://doi.org/10.3221/IGF-ESIS.29.29.

Chicago

Zega, V., C. Comi, A. Corigliano, and C. Valzasina. 2014. “Integrated structure for a resonant micro-gyroscope and accelerometer.” Fracture and Structural Integrity 8 (29): pages 334–342. https://doi.org/10.3221/IGF-ESIS.29.29.

Harvard

Zega, V., Comi, C., Corigliano, A. and Valzasina, C. (2014) ‘Integrated structure for a resonant micro-gyroscope and accelerometer’, Fracture and Structural Integrity, 8(29), pp. pages 334–342. doi: 10.3221/IGF-ESIS.29.29.

Vancouver

Zega V, Comi C, Corigliano A, Valzasina C. Integrated structure for a resonant micro-gyroscope and accelerometer. Fracture and Structural Integrity. 2014;8(29):pages 334-342. doi:10.3221/IGF-ESIS.29.29

BibTeX

@article{zega2014, author = {Zega, V. and Comi, C. and Corigliano, A. and Valzasina, C.}, title = {Integrated structure for a resonant micro-gyroscope and accelerometer}, journal = {Fracture and Structural Integrity}, year = {2014}, volume = {8}, number = {29}, pages = {pages 334--342}, doi = {10.3221/IGF-ESIS.29.29}, url = {https://doi.org/10.3221/IGF-ESIS.29.29}, issn = {1971-8993} }

RIS

TY - JOUR AU - Zega, V. AU - Comi, C. AU - Corigliano, A. AU - Valzasina, C. TI - Integrated structure for a resonant micro-gyroscope and accelerometer JO - Fracture and Structural Integrity T2 - Fracture and Structural Integrity PY - 2014 DA - 2014/07/09 VL - 8 IS - 29 SP - pages 334 EP - 342 DO - 10.3221/IGF-ESIS.29.29 UR - https://doi.org/10.3221/IGF-ESIS.29.29 SN - 1971-8993 ER -

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