A numerical study of squeeze-film damping in MEMS-based structures including rarefaction effects. Fracture and Structural Integrity, [S. l.], v. 7, n. 23, p. Pages 103–113, 2012. DOI: 10.3221/IGF-ESIS.23.11. Disponível em: https://staging.fracturae.com/index.php/fis/article/view/168. Acesso em: 16 oct. 2026.